Abstract
We have investigated the source of dislocations generated during growth and subsequent cooling of quasi-monocrystalline silicon. Bi-crystals of silicon separated by ∼5.2° tilt small angle grain boundary have been directionally solidified at two different pulling rates, i.e., 3 and 13 μm s-1. We observe higher density of grain boundary-associated dislocations at the ingot pulled at a lower rate. This observation is explained by the impact of oxygen precipitation behavior at the grain boundary.
| Original language | English |
|---|---|
| Pages (from-to) | 122-126 |
| Number of pages | 5 |
| Journal | Physica Status Solidi (A) Applications and Materials Science |
| Volume | 213 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 1 Jan 2016 |
Keywords
- dislocations
- grain boundary
- impurities
- precipitates
- quasi-mono silicon