Stress engineering in amorphous silicon thin films
- Eric Johlin*
- , Sebastián Castro-Galnares
- , Amir Abdallah
- , Nouar Tabet
- , Mariana I. Bertoni
- , Tesleem Asafa
- , Jeffrey C. Grossman
- , Said Sayed
- , Tonio Buonassisi
*Corresponding author for this work
- Massachusetts Institute of Technology
- King Fahd University of Petroleum and Minerals
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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