Process monitoring and in line composition assessment of high throughput thin film processes by resonant Raman spectroscopy

  • Victor Izquiero-Roca
  • , Edgardo Saucedo
  • , Alejandro Perez-Rodriguez
  • , Juan Morante
  • , Veronica Bermudez*
    • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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