Microstructural Developments and Dielectric Properties of Rapid Thermally Processed PZT Thin Films Derived by Metallo‐organic Decomposition

Microstructural developments and dielectric properties of lead zirconate titanate thin films (0.22 4mUm) with the composition Pb(Zr_0.53Ti_0.47)O₃ were studied. The films were prepared by metallo‐organic decomposition (MOD) and rapid thermal processing (RTP) in the temperature range 475–825°C for 2 min in an oxygen gas flow with and without post‐annealing. An amorphous–pyrochlore–perovskite phase transformation is indicated at or below 525°C RTF temperatures while a direct amorphous‐to‐perovskite phase transformation is indicated at higher RTP temperatures. A decrease in grain size with increasing temperature is correlated with an increase in and dominance of nucleation of perovskite sites. The best dielectric and fatigue properties were exhibited by films processed in the temperature range 725–775°C. Hysteresis loops tended toward squareness and polarization charges increased with increased temperature. Furthermore, 45% of the initial charge remained after 10⁹switching reversals. A degradation, however, was observed in both properties at higher temperatures.