@inbook{2a80b903912142a48fff4fd2c39a17ef,
title = "Fundamentals of Micro-Manufacturing",
keywords = "Micro-machining for discrete part micro-manufacturing - need for fast, direct and mass manufacturing of miniaturized functional products, metals, polymers, composites and ceramics, Micro-manufacture fundamentals, and micro-electromechanical systems (MEMS) - limited to silicon, techniques as etching, photolithography, and electrochemical deposition, Numerical models, for micro-machining of single crystalline materials - understanding deformations, micro-structure and grain size effects, and influence of tool edge radius on micro-milling",
author = "Muammer Ko{\c c} and Tuǧrul {\"O}zel",
year = "2011",
month = mar,
day = "14",
doi = "10.1002/9781118010570.ch1",
language = "English",
isbn = "9780470556443",
pages = "1--23",
booktitle = "Micro-Manufacturing",
publisher = "John Wiley and Sons",
}