Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors

Miao Lu; Amine Bermak; Yi Kuen Lee

Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors

Miao Lu^*, Amine Bermak, Yi Kuen Lee

^*Corresponding author for this work

Hong Kong University of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

18 Citations (Scopus)

Abstract

This paper reports the characterization of piezoresistivity of Conductive Polydimethylsiloxane (CPDMS) and the corresponding fabricating process for a parylene-coated, CPDMS Micro Fingerprint Sensor (MFS) with mushroom-shaped electrodes. Gauge factor of about 7.4 was demonstrated, and the piezoresistive sensitivity was about 3×10^-6 Pa^-1 in the tensile test setup. The packaged MFS sensors were characterized by a pneumatic test and a nanoindentation test. We demonstrate that the fabricated device can detect pressure and force levels bellow 10 kPa and 50 μN, respectively. The use of the material and process presented in this paper offers the opportunity to realize a robust micro fingerprint sensor with low cost, low temperature process on different substrates.

Original language	English
Title of host publication	Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Pages	251-254
Number of pages	4
Publication status	Published - 2007
Externally published	Yes
Event	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan Duration: 21 Jan 2007 → 25 Jan 2007

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007
Country/Territory	Japan
City	Kobe
Period	21/01/07 → 25/01/07

Cite this

Lu, M., Bermak, A., & Lee, Y. K. (2007). Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors. In Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007 (pp. 251-254). Article 4433102 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Lu, Miao ; Bermak, Amine ; Lee, Yi Kuen. / Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors. Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. pp. 251-254 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{128a60ce275e4976a279207683c59f8e,

title = "Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors",

abstract = "This paper reports the characterization of piezoresistivity of Conductive Polydimethylsiloxane (CPDMS) and the corresponding fabricating process for a parylene-coated, CPDMS Micro Fingerprint Sensor (MFS) with mushroom-shaped electrodes. Gauge factor of about 7.4 was demonstrated, and the piezoresistive sensitivity was about 3×10-6 Pa-1 in the tensile test setup. The packaged MFS sensors were characterized by a pneumatic test and a nanoindentation test. We demonstrate that the fabricated device can detect pressure and force levels bellow 10 kPa and 50 μN, respectively. The use of the material and process presented in this paper offers the opportunity to realize a robust micro fingerprint sensor with low cost, low temperature process on different substrates.",

author = "Miao Lu and Amine Bermak and Lee, \{Yi Kuen\}",

year = "2007",

language = "English",

isbn = "1424409519",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "251--254",

booktitle = "Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007",

note = "20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 ; Conference date: 21-01-2007 Through 25-01-2007",

}

Lu, M, Bermak, A & Lee, YK 2007, Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors. in Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007., 4433102, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 251-254, 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007, Kobe, Japan, 21/01/07.

Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors. / Lu, Miao; Bermak, Amine; Lee, Yi Kuen.
Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007. 2007. p. 251-254 4433102 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors

AU - Lu, Miao

AU - Bermak, Amine

AU - Lee, Yi Kuen

PY - 2007

Y1 - 2007

N2 - This paper reports the characterization of piezoresistivity of Conductive Polydimethylsiloxane (CPDMS) and the corresponding fabricating process for a parylene-coated, CPDMS Micro Fingerprint Sensor (MFS) with mushroom-shaped electrodes. Gauge factor of about 7.4 was demonstrated, and the piezoresistive sensitivity was about 3×10-6 Pa-1 in the tensile test setup. The packaged MFS sensors were characterized by a pneumatic test and a nanoindentation test. We demonstrate that the fabricated device can detect pressure and force levels bellow 10 kPa and 50 μN, respectively. The use of the material and process presented in this paper offers the opportunity to realize a robust micro fingerprint sensor with low cost, low temperature process on different substrates.

AB - This paper reports the characterization of piezoresistivity of Conductive Polydimethylsiloxane (CPDMS) and the corresponding fabricating process for a parylene-coated, CPDMS Micro Fingerprint Sensor (MFS) with mushroom-shaped electrodes. Gauge factor of about 7.4 was demonstrated, and the piezoresistive sensitivity was about 3×10-6 Pa-1 in the tensile test setup. The packaged MFS sensors were characterized by a pneumatic test and a nanoindentation test. We demonstrate that the fabricated device can detect pressure and force levels bellow 10 kPa and 50 μN, respectively. The use of the material and process presented in this paper offers the opportunity to realize a robust micro fingerprint sensor with low cost, low temperature process on different substrates.

UR - https://www.scopus.com/pages/publications/52249123455

M3 - Conference contribution

AN - SCOPUS:52249123455

SN - 1424409519

SN - 9781424409518

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 251

EP - 254

BT - Proceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007

T2 - 20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

Y2 - 21 January 2007 through 25 January 2007

ER -

Fabrication technology of piezoresistive conductive PDMS for micro fingerprint sensors

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