Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz

Wan Wang; Maciej Baranski; Yabin Jin; Roland Salut; Djaffar Belharet; Jean Michel Friedt; Yongdong Pan; Yanxun Xiang; Fu zhen Xuan; Abdelkrim Khelif; Sarah Benchabane

doi:10.1002/advs.202411825

Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz

Wan Wang, Maciej Baranski, Yabin Jin^*, Roland Salut, Djaffar Belharet, Jean Michel Friedt, Yongdong Pan, Yanxun Xiang, Fu zhen Xuan, Abdelkrim Khelif, Sarah Benchabane^*

^*Corresponding author for this work

CSE Information & Computing Technology

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Abstract

Metasurfaces, consisting of subwavelength-thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on-chip surface acoustic wave (SAW) at sub-GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on-chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y-cut lithium niobate (LiNbO₃) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on-demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on-chip SAW metasurfaces for diverse potential applications at micro- and nanoscale.

Original language	English
Article number	2411825
Journal	Advanced Science
Volume	12
Issue number	12
Early online date	Jan 2025
DOIs	https://doi.org/10.1002/advs.202411825
Publication status	Published - 27 Mar 2025

Keywords

microfabrication process
on chip metasurface
scattered wave
subwavelength focusing
surface acoustic waves

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10.1002/advs.202411825

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title = "Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz",

abstract = "Metasurfaces, consisting of subwavelength-thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on-chip surface acoustic wave (SAW) at sub-GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on-chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y-cut lithium niobate (LiNbO3) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on-demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on-chip SAW metasurfaces for diverse potential applications at micro- and nanoscale.",

keywords = "microfabrication process, on chip metasurface, scattered wave, subwavelength focusing, surface acoustic waves",

author = "Wan Wang and Maciej Baranski and Yabin Jin and Roland Salut and Djaffar Belharet and Friedt, \{Jean Michel\} and Yongdong Pan and Yanxun Xiang and Xuan, \{Fu zhen\} and Abdelkrim Khelif and Sarah Benchabane",

note = "Publisher Copyright: {\textcopyright} 2025 The Author(s). Advanced Science published by Wiley-VCH GmbH.",

year = "2025",

month = mar,

day = "27",

doi = "10.1002/advs.202411825",

language = "English",

volume = "12",

journal = "Advanced Science",

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T1 - Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz

AU - Wang, Wan

AU - Baranski, Maciej

AU - Jin, Yabin

AU - Salut, Roland

AU - Belharet, Djaffar

AU - Friedt, Jean Michel

AU - Pan, Yongdong

AU - Xiang, Yanxun

AU - Xuan, Fu zhen

AU - Khelif, Abdelkrim

AU - Benchabane, Sarah

PY - 2025/3/27

Y1 - 2025/3/27

N2 - Metasurfaces, consisting of subwavelength-thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on-chip surface acoustic wave (SAW) at sub-GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on-chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y-cut lithium niobate (LiNbO3) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on-demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on-chip SAW metasurfaces for diverse potential applications at micro- and nanoscale.

AB - Metasurfaces, consisting of subwavelength-thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on-chip surface acoustic wave (SAW) at sub-GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on-chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y-cut lithium niobate (LiNbO3) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on-demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on-chip SAW metasurfaces for diverse potential applications at micro- and nanoscale.

KW - microfabrication process

KW - on chip metasurface

KW - scattered wave

KW - subwavelength focusing

KW - surface acoustic waves

UR - https://www.scopus.com/pages/publications/105001642022

U2 - 10.1002/advs.202411825

DO - 10.1002/advs.202411825

M3 - Article

AN - SCOPUS:105001642022

SN - 2198-3844

VL - 12

JO - Advanced Science

JF - Advanced Science

IS - 12

M1 - 2411825

ER -

Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz

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