Experimental Realization of On-Chip Surface Acoustic Wave Metasurfaces at Sub-GHz

Metasurfaces, consisting of subwavelength-thickness units with different wave responses, provide an innovative possible method to manipulate elastic and acoustic waves efficiently. The application of metasurfaces to manipulate on-chip surface acoustic wave (SAW) at sub-GHz frequencies requires further exploration since their wave functions are highly demanded in nanoelectromechanical systems (NEMS), sensing, communications, microfluid control and quantum processing. Here, the experimental realization of on-chip SAW metasurfaces is reported, consisting of gradient submicron niobium (Nb) rectangular pillars positioned on a 128°Y-cut lithium niobate (LiNbO₃) substrate that operate at hundreds of megahertz. The proposed SAW metasurfaces are able to manipulate transmitted SAW wavefront functions by designing on-demand pillar's profile distributions. Broadband subwavelength focusing effects as the typical functions of SAW metasurfaces are experimentally demonstrated. This study opens a door for realizing on-chip SAW metasurfaces for diverse potential applications at micro- and nanoscale.