Abstract
A carbon based material, an optical rectenna and a semiconductor device including the same are provided. The carbon based material includes a carbon nanomaterial and a metal material bonded to the carbon nanomaterial, where the carbon nanomaterial includes a fluorine material.
| Original language | English |
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| Patent number | US2020350451 |
| IPC | H01L 31/ 054 A I |
| Priority date | 3/05/19 |
| Publication status | Published - 5 Nov 2020 |