An Optical Study of PZT Thin Film Capacitors

C. R. Peterson; S. A. Mansour; A. Bement

doi:10.1080/10584589508012286

An Optical Study of PZT Thin Film Capacitors

C. R. Peterson, S. A. Mansour, A. Bement

Purdue University

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

PZT thin film capacitors with the composition Pb(Zr_0.53 Ti_0.47)O₃ were deposited via metallo-organic decomposition (MOD) and rapid thermally processed (RIP) at a substrate temperature of 825°C. The photo-response of these capacitors was determined by measuring the change in saturation polarization and resistance as a function of incident photon energy prior to and after fatigue testing. We propose that photo-generated free carriers can screen and/or recombine with trapped charge which restores local charge equilibrium within the PZT capacitor and hence, temporarily restores polarization.

Original language	English
Pages (from-to)	295-300
Number of pages	6
Journal	Integrated Ferroelectrics
Volume	10
Issue number	1-4
DOIs	https://doi.org/10.1080/10584589508012286
Publication status	Published - 1 Oct 1995
Externally published	Yes

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abstract = "PZT thin film capacitors with the composition Pb(Zr0.53 Ti0.47)O3 were deposited via metallo-organic decomposition (MOD) and rapid thermally processed (RIP) at a substrate temperature of 825°C. The photo-response of these capacitors was determined by measuring the change in saturation polarization and resistance as a function of incident photon energy prior to and after fatigue testing. We propose that photo-generated free carriers can screen and/or recombine with trapped charge which restores local charge equilibrium within the PZT capacitor and hence, temporarily restores polarization.",

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year = "1995",

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N2 - PZT thin film capacitors with the composition Pb(Zr0.53 Ti0.47)O3 were deposited via metallo-organic decomposition (MOD) and rapid thermally processed (RIP) at a substrate temperature of 825°C. The photo-response of these capacitors was determined by measuring the change in saturation polarization and resistance as a function of incident photon energy prior to and after fatigue testing. We propose that photo-generated free carriers can screen and/or recombine with trapped charge which restores local charge equilibrium within the PZT capacitor and hence, temporarily restores polarization.

AB - PZT thin film capacitors with the composition Pb(Zr0.53 Ti0.47)O3 were deposited via metallo-organic decomposition (MOD) and rapid thermally processed (RIP) at a substrate temperature of 825°C. The photo-response of these capacitors was determined by measuring the change in saturation polarization and resistance as a function of incident photon energy prior to and after fatigue testing. We propose that photo-generated free carriers can screen and/or recombine with trapped charge which restores local charge equilibrium within the PZT capacitor and hence, temporarily restores polarization.

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JO - Integrated Ferroelectrics

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An Optical Study of PZT Thin Film Capacitors

Abstract

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