@inproceedings{048404a698e147de9aaf052ad5684e5d,
title = "A Sensitivity-Enhanced MEMS-ASIC Integrated Thermal Flow Sensor Based on an Improved Constant Temperature Difference Control Scheme",
abstract = "This paper presents an improved constant temperature difference (iCTD) control scheme for MEMS thermal flow sensors, in which the downstream detector is employed as the on-chip reference temperature element. By maintaining a constant temperature difference (ΔTh\_d) between the microheater and the downstream detector through a modified feedback bridge, the proposed scheme leverages higher microheater temperatures to enhance response. The functionality and stability of this architecture were rigorously verified through a system-level MEMS-ASIC co-simulation. Experimental results demonstrate that under an initial overheat temperature (ΔTh\_a) of 45 K at zero flow, the iCTD scheme achieves an average improvement of 26.7\% in normalized sensitivity across the entire measurement range compared to the conventional CTD approach.",
keywords = "Improved constant temperature difference, MEMS, System-level model, Thermal flow sensor",
author = "Ziqi Liu and Kai Qiao and Xinyuan Zhang and Xinbo Jiang and Daishan Yue and Zong Liu and Huikai Xie and Bo Wang and Xiaoyi Wang",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 21st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026 ; Conference date: 17-04-2026 Through 21-04-2026",
year = "2026",
month = apr,
day = "21",
doi = "10.1109/NEMS69704.2026.11633828",
language = "English",
series = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "600--603",
booktitle = "2026 IEEE 21st International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2026",
address = "United States",
}